China’s bold move: its own 28 nm lithography equipment ready before end of 2023

By Brandon Lee

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China's bold move

In a landscape where chipmaking prowess defines global influence, China’s latest reveal is nothing short of audacious. Faced with stringent export curbs threatening to derail its semiconductor goals, Beijing has jumped in with a bold, homegrown answer. This move not only underscores the stakes of the ongoing chip cold war but also offers a glimpse of how far the country is willing to go to reclaim technological independence.

a quick backdrop: the chip cold war heats up

If you’ve followed the recent headlines, you’ll know that the United States and its allies have been tightening the screws on China’s chip ambitions. In a bid to maintain a technological edge, Washington has rallied key semiconductor powerhouses—Japan, South Korea, Taiwan, Germany and the Netherlands—to block exports of the most advanced photolithography machines. Since January 2024, ASML, the Dutch giant with a virtual monopoly on deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, will no longer ship its top-tier DUV scanners to Chinese firms. This move is designed to prevent China from mastering sub-5 nm fabrication, a node widely seen as critical to leading the AI arms race and next-generation computing.

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china digs deep to go it alone

Beijing hasn’t taken this lying down. Over the past decade, the government has poured tens of billions into what it calls semiconductor sovereignty. In 2014, an initial fund of about US $19 billion went into chip research and manufacturing; by 2019, that war chest had swelled to roughly US $27.5 billion. Yet nothing prepared us for the dramatic September announcement: a further US $41 billion to turbo-charge local makers of integrated circuits and lithography tools.

It’s like watching a marathon runner who, finding the finish line blocked, suddenly reaches into a hidden stash of energy gels—China is doubling down on homegrown capability. State-owned behemoths such as SMIC have already grabbed the spotlight by reverse-engineering a 7 nm process to power Huawei’s Mate 60 Pro SoC, despite relying on older DUV kit not designed for such fine geometries.

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smee’s leap forward and the road ahead

Enter SMEE (Shanghai Micro Electronics Equipment Group), the public-sector outfit tasked with cloning—or better yet supplanting—ASML on Chinese soil. Until now, SMEE’s crown jewel has been the SSA600/20 scanner, good for 90 nm chips but a far cry from the sub-5 nm domain. Then, out of the blue, came the October reveal: the SSA/800-10W, a 28 nm-capable lithography system slated for deployment by December 2023.

To put that into perspective, moving from 90 nm to 28 nm in one generation is akin to leaping from a hatchback to a sports car overnight—impressive, yes, but you’re still not on the racetrack where the hypercars are tearing up asphalt. While SMEE’s breakthrough marks a technological leap, it still falls short of EUV capabilities, the holy grail held exclusively by ASML. Indeed, ASML itself is rumoured to be gearing up to deliver its second-generation high-numerical-aperture EUV scanners to clients like Intel as early as 2024, further widening the gap.

What does this mean for China’s semiconductor journey? In the short term, manufacturers will breathe easier knowing they can churn out 28 nm chips without fear of fresh import bans. That node still underpins countless automotive, consumer-electronics and industrial applications—so expect to see it in everything from home appliances to electric vehicles. But the cliff edge remains: high-volume production of 7 nm and below will continue to hinge on breakthroughs in EUV lithography, a field where genuine self-reliance still seems years away.

I’ll be keeping a close eye on the next trade-show circuit, where the SSA/800-10W makes its public debut. If ever there was a symbol of China’s chip ambitions, it will be that gleaming scanner in its custom-painted enclosure, ready to carve out the next chapter in the global semiconductor saga.

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